師資人員	首頁師資人員專任教師

利定東 教授　Li Ting Tung 辦公室： (Office) E2-204 專線電話： (Tel) x 校內分機： (Campus Extension) x 傳真電話: (Fax) 03-4254501 E-mail： tomili@ncu.edu.tw

論文著作 (Publications)

題目 作者姓名 期刊名稱 出版 年份 期別及 起訖頁數 期別種類 Investigation of the Amorphous to Microcrystalline Phase Transition of Thin Film Prepared by Electron Cyclotron Resonance Chemical Vapor Deposition Method Teng-Hsiang Chang, Jenq-Yang Chang, Yen-Ho Chu, Chien-Chieh Lee, I-Chen Chen, Tomi Li Surface & Coatings Technology 2012 Available online Effective Gap Filling via Magnetic Field Simulation Assisted on Longthrow Sputtering PVD of Side Magnet Designs and Arrangements for 3DIC Application Tomi T. Li, H. T. Chen, J. S. Yeh, Thomas C. K. Yang, S. W. Yang, H. H. Liu and Leo Chiang ECS Trans 2012 volume 44 P.857-P.864 Very high deposition rate of a-Si:H thin films by ECRCVD H.F. Chiu, Y.S. Chang, J.Y. Wu, Y.S. Li, J.Y. Chang, C.C. Lee, I.C. Chen, C.C. Su, Tomi T. Li ECST 2011 volume 34, P.1165-P.1171 Improvements on The Uniformity of a-Si Solar Thin Films by Using Auxiliary Magnetic Field L.C. Hu, Y.P. Chen, J.Y. Chang, J.J. Lee, I.C. Chen, and Tomi T. Li ECST 2011 volume 34, P.1097-P.1101 Effects of Microwave Power on Thermal Annealing Behaviors of Hydrogenated Amorphous Silicon Ping-Jung Wu, I-Chen Chen, Chien-Chieh Lee, Jenq-Yang Chang, Tomi T. Li, and Chiung-Chieh Su 218th ECS Meeting 2011 33(17): 65-69 Solar Cell Technologies and Trends Tomi Li 9th ESC/SEMI China Semiconductor Technology International Conference 2010 P.165 - P.167 In-situ advanced clean for 65nm Pre-Ni Silicide deposition (Siconi) to resolve defectivitity in NiSix module Z. Xu, S. Wang, L. Yang, R. Yang, Y Hu, J. Ning, H. Wu and Tomi. Li J.Vac. Sci. Technol B 2010 28，P.56-P.61 Thermal annealing study on a-Si, nc-Si and μc-Si solar thin films grown by electron cyclotron resonance chemical vapor deposition Tomi Li, I.-C. Chen, J.-Y. Chang Proceedings of 10th International Symposium on Sputtering and Plasma Processes 2009 P.450-P.453

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