新型專利 |
Method for manufacturing silicon thin-film solar cells |
USA |
Tomi T. LI, Jeng-Yang Chang, Sheng-Hui Chen, Cheng-Chung Lee |
13/343,373 US 8,679,892 B2 201403~203403 |
The present invention relates to a method for manufacturing
silicon thin-flm solar cells, including: providing a substrate;
forming a first electrode on the substrate; forming a first
doped semiconductor layer on the first electrode by chemical
vapor deposition; forming an intrinsic layer on the first doped
semiconductor layer by chemical vapor deposition, Where the
intrinsic layer includes a plurality of amorphous/nanocrystal
line silicon layers, and the intrinsic layer has various energy
bandgaps formed by varying average grain siZes of the amor
phous/nanocrystalline silicon layers; forming a second doped
semiconductor layer on the intrinsic layer by chemical vapor
deposition, Where one of the first doped semiconductor layer
and the second doped semiconductor layer is a p-type amor
phous silicon layer and the other is an n-type amorphous/
nano-microcrystalline silicon layer; and forming a second
electrode on the second doped semiconductor layer. Accord
ingly, the present invention can achieve broadband absorption
in a single junction structure. |